設(shè)備名稱(chēng) Equipment Name

管式PE-Poly設(shè)備  Horizontal PECVD (Poly-Si)

設(shè)備型號(hào) Equipment Model

PD-520/PD-520L/PD-520MAX

設(shè)備用途 Equipment Application

TOPCon電池隧穿氧化層、i-Poly、D-poly沉積。

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.

技術(shù)特點(diǎn)  Features

1、隧穿氧化層、i-poly、D-poly三合一同管完成，減少工藝環(huán)節(jié)，有效提升良率、降低碎片率。

The tunnel oxide layer, i-poly, and D-poly layers can be coated in the same furnace tube which helps in reducing the process steps, improving the yield and lowering the breakage rate effectively.

2、無(wú)熱壁特性，石英管使用壽命長(zhǎng)。
Without hot wall effects, so quartz tube has a long service life. 

3、繞鍍輕微，易去除。
Slight wrap-around deposition which is easy to be removed.

4、精準(zhǔn)摻雜、可引入其它提效摻雜元素，工藝拓展、提效空間大。
Precise doping; available to introduce other efficiency-enhancing doping elements, suitable for process expansion and large space for efficiency improvement.

5、防導(dǎo)通專(zhuān)利技術(shù)。
Patented anti-conduction technology.

設(shè)備參數(shù)  Parameters